FTIR Spectroscopic Techniques for Quantitative Characterization by Abrasion with Potassium Bromide

Abstract

In previous methods for the quantitative infrared analysis of solids in KBr (potassium bromide) it has been necessary to obtain
pellets of reproducible or known thickness. The infrared spectra in the 5000-370 cm-1 (% transmission versus cm-1) region are
generally recorded with the KBr pellet method which has some advantages over the mull techniques; absence of interfering bands
of the matrix, lower scattering losses, higher resolution of spectra, better control of concentration and homogeneity of sample,
possibility of storage of specimens for further studies, so on. Using an internal standard in Nujol mulls which it is not necessary to
determine the sample thickness, a quantitative infrared method was developed. There are many analytical methods that are used as
physical and chemical characterization techniques for the microelectronics industry. Film thickness has been routinely determined
by optical reflectance and ellipsometric techniques and recently by thermal wave measurements. Qualitative IR spectroscopy is a
valuable analytical tool that allows for the identification of organic and inorganic materials. Each compound’s IR spectrum contains
a substantial amount of information. This information, besides some patience, skill, and knowledge about a sample’s background,
can be used to determine molecular structures successfully, as well as to characterize unknown materials.